This heavy duty manual wafer probing station is designed for a constant, comfortable, and accurate operation on up to 14” wafers.

This turn-key, manually operated wafer probing station is part of the D-COAX commitment to the semiconductor test and measurement and fabrication industries. This affordable machine offers a heavy duty design for continuous usage. This is the first wafer probing station to offer completely independent X, Y, Z, ? and ganged Y control which has back-drivable Z controls. Its versatility, affordability, and user friendly features make it the best manual wafer probe station on the market!

Model D14 Probe Station Benefits

In the last few decades, the probe stations have evolved from user friendly measurementModel D14 Analytical Probe Station tools into the large and expensive measurement tools that require training in new software and non-intuitive controls.  These new complicated probe stations have greatly benefited the production throughput but development engineers are stuck using these machines for their development work. But not anymore, no more waiting for the probe station to be available because of complex software, systems, and training: people tell us that they really like the straight forward controls and how easy it is to use the D14. At D-COAX we listened to the wishes and complaints of engineers that need measurements but they do not want many of the features of the probe stations they use now.  D14 is only 1/3 of the price of the competitor’s machines and development engineering departments can greatly benefit by having a dedicated station for development and characterization.

Straight-forward use:  Measurements on the D14 probe station are easy and quickprobe, vacuum control, device rotation, probe station vacuum since the controls are straight forward. There are easy to understand controls for probe placement, vacuum control, device rotation, ganging the probes (used for a repeated pattern on devices).  There is no complex software to learn, the user can see the entire device with a normal microscope instead of a video monitor.  The device to be measured is not deep within the probe station with motors and other apparatus in the way, and there is no need to move things around just to see where the probes are.

Small Footprint probe station: The D14 fits comfortably in most labs and engineering environments. It is only 39 inches long and 26 inches wide and 19.5 inch high. This is an area that allows the test equipment to sit closer to the device to be measured, the coaxial cables can be shorter for better corrections, and the D-14 probe station is 2 to 4 times smaller than most probe stations with which it competes.  All though the D14 uses less bench space, the D14 can measure large devices with its chuck diameter of 14 inch.

Crucial features to make your job easier: The chuck rotates 380 degrees, without any back lash, so that devices can be reversed without adjusting the vacuum. Four 6-inch wafers can be loaded simultaneously on this 14 inch chuck for comparison measurements. All the probe positions can reach all of the 14 inch chuck surface so you don’t run into repositioning headaches. All the concentric ring vacuums are independent as well as all 17 of the diagonal vacuum controls for complete control over multiple devices to be measured. The positioners are specially designed so that pressure cannot accidentally push the probe into a device. The gantry style design of the D14 allows for very large loads, like tuners or load pull devices, to be placed on the system and still glide easily for all the movements. The microscope light source is nicely tucked away on top of the post for the microscope so that the fiber optic light pipe does not drag across the system controls or your devices.

Low Cost: The Model D14 probe station with a typical configuration starts at less than $50,000. USD.

Typical configuration includes:

  1. Model D14 probe station
  2. Vacuum pump (vacuum up to 29 in. Hg (31 mbar))
  3. Microscope (Olympus: 6.7X – 45X magnification, with 2 eyepieces, focusing mount, stand, light source, and fiber optic ring light).  Other microscope are available (Olympus: 16X – 112X, Olympus: 19X – 135X). See accessories.

Competitor capabilities/cost vs. D-COAX

D_COAX model D14 D-COAX Competitor “A” Competitor “B” Competitor “C” Competitor “D”
Wafer size capacity 14 Inches 12 inches 12 inches 12 inches 12 inches
Each probe reached all of wafer Yes Yes No No Yes
Anti-crash probe positioners Yes No No Yes Yes
Ability for “ganged’ probing Yes No No No No
Back-drivable probe holder movement Yes No   No  No No 
Independent Z-lift controls Yes  No No   No No 
Gantry style probe holders Yes  No No  No  No 
Zero back-lash for chuck rotation Yes  No No  No  No 
Chuck rotation +/- 190 degrees +/-7.5 degrees No +/-20 degrees No
Low chuck to table height Yes, 6.5″ No, >30″ No, >30″ No, >30″ No, >30″
Small footprint station Yes, <26″x39″ No, <88″x56″ No, <88″x56″ No, <88″x56″ No, <88″x56″
One-to-one vacuum controls Yes  No No   No No 
Independent vacuum controls Yes  No No  No  No 
Vibration isolation feet Yes  Yes Yes  Yes  Yes 
Low cost Yes, $42k No,  >$100k   No, >$100k  No, >$100k   No,  >$100k

Model D14 Probe Station Features

  • Full reach of the 14 inch (355.6mm) chuck surface
  • Independent (coarse) X, Y, Z, ?, ganged Y controls
  • Independent Vacuum control for 3″, 6″, 8″. 10″, 12″ and (14″) wafer diameters
  • Back drivable (coarse) X controls
  • Seventeen independently operated vacuum positions for calibration substrates or other devices.
  • Very low table to chuck height of 6.25 inches
  • One-to-one correlation of vacuum actuation and chuck vacuum positions
  • Very small foot print, width 39 inch by length 26 inch, weight 200 lbs (without microscope or microscope hardware or light source. Add an additional 12 inches to the width for the microscope boom).  Over all product dimensions are 39 inches wide, 26 inches long (with microscope boom 36 inches), 19.5 inches high (25 inches with microscope).
  • Independent probe to probe pitch or ganged probe to probe pitch
  • Two independent Z-lifts with locks
  • Zero backlash ? control with locking handle
  • Storage tray for small tools
  • Independent (fine) X, Y, Z controls for maximum alignment
  • Vibration isolation feet

• Independent (coarse) X, Y, Z, ?, ganged Y controls.

• Back drivable (coarse) X controls.

• Very low table to chuck height of 6.25 inches

• Very small foot print, width 39 inch by length 26 inch, weight 200 lbs (without microscope or microscope hardware or light source. Add an additional 12 inches to the width for the microscope boom).  Over all product dimensions are 39 inches wide, 26 inches long (with microscope boom 36 inches), 19.5 inches high (25 inches with microscope).

• Storage tray for small tools.

• Vibration isolation feet.

Model D14 Probe Station Requirements/Utilities:

In order to have a complete test setup for measuring the DUT the following hardware and utilities are required:

  1. Test instrument capable of the specific DUT test requirements
  2. Cables capable of the specific DUT test requirements (see D-COAX cable assemblies offerings – Semi-rigid    and Flexible assemblies)
  3. Vacuum pump
  4. Microscope
  5. Microscope hardware and light-source
  6. Probes (D-COAX suggests GGB probes (www.ggb.com)
  7. Accessories for specific DUT sizes and topography (Accessories offerings by D-COAX)